Distortion evaluation using SEM equipment
EBSD: Electron Backscatter Diffraction
Measurements can be performed in bulk state without the need for thinning processes like TEM (NBD: Nano Beam Diffraction). It has the high spatial resolution characteristic of SEM and relatively high strain sensitivity. Additionally, there is a possibility of detecting local lattice strain as tensor data.
- 企業：一般財団法人材料科学技術振興財団 MST
- 価格：Other
